Tokyo Electron BX80-000062-V1控制器機架 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Tokyo Electron (TEL) BX80-000062-V1 控制器機架 — 產(chǎn)品應用領域詳解
1. 半導體制造設備中的主控框架
核心作用：BX80-000062-V1 控制器機架是安裝和集成多塊控制模塊、電源單元、通信接口板等核心組件的機械與電氣平臺。
主要任務：統(tǒng)一承載和管理設備控制系統(tǒng)所需的各類控制板卡和模塊，形成系統(tǒng)級控制架構(gòu)。
應用設備：廣泛用于光刻機、刻蝕機、涂膠顯影機、CVD 等關鍵半導體生產(chǎn)設備。
2. 控制系統(tǒng)模塊化部署平臺
模塊安裝：支持多插槽結(jié)構(gòu)，可靈活配置 CPU 板、I/O 控制板、通訊板等。
便于維護：模塊化設計方便快速更換故障組件，提升設備可維護性和稼動率。
擴展性強：根據(jù)工藝或控制需求可添加/移除控制單元，適應不同產(chǎn)品線。
3. 系統(tǒng)通信與電源集中管理
通信整合：機架內(nèi)部布設通信總線，為控制器各模塊之間提供統(tǒng)一高速數(shù)據(jù)通道（如VME、PCIe或?qū)Ｓ锌偩€）。
電源分配：集成統(tǒng)一的電源接口和分配結(jié)構(gòu)，為每個模塊提供穩(wěn)定電源，降低布線復雜度。
英文資料：
Tokyo Electron (TEL) BX80-000062-V1 Controller Rack - Detailed Explanation of Product Application Fields
1. Main control framework in semiconductor manufacturing equipment
Core function: The BX80-000062-V1 controller rack is a mechanical and electrical platform for installing and integrating multiple control modules, power units, communication interface boards, and other core components.
Main task: Unify and manage various control boards and modules required for equipment control systems, forming a system level control architecture.
Application equipment: Widely used in key semiconductor production equipment such as lithography machines, etching machines, coating and developing machines, CVD, etc.
2. Modular deployment platform for control system
Module installation: Supports multi slot structure, allowing flexible configuration of CPU board, I/O control board, communication board, etc.
Easy to maintain: Modular design facilitates quick replacement of faulty components, improving equipment maintainability and utilization rate.
Strong scalability: Control units can be added/removed according to process or control requirements to adapt to different product lines.
3. System communication and centralized power management
Communication integration: Communication buses are installed inside the rack to provide a unified high-speed data channel (such as VME, PCIe, or proprietary buses) between various modules of the controller.
Power distribution: Integrating a unified power interface and distribution structure to provide stable power for each module and reduce wiring complexity.
2.產(chǎn) 品 展 示
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