Tokyo Electron 3D81-000102-V1接口板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Tokyo Electron (TEL) 3D81-000102-V1 接口板 — 產(chǎn)品應(yīng)用領(lǐng)域詳解
一、產(chǎn)品功能定位
3D81-000102-V1 接口板是 Tokyo Electron 半導(dǎo)體制造設(shè)備中用于信號(hào)轉(zhuǎn)換、控制通信和模塊互聯(lián)的重要部件。它作為設(shè)備控制系統(tǒng)與外部執(zhí)行單元之間的數(shù)據(jù)橋梁，在設(shè)備運(yùn)行過程中起到“控制中樞延伸”的作用。
二、主要應(yīng)用領(lǐng)域
1. 設(shè)備模塊間通信接口
功能說明：將主控系統(tǒng)（如主控制器、處理器模塊）與子系統(tǒng)（如氣體控制單元、溫控模塊、馬達(dá)控制器）連接；
應(yīng)用價(jià)值：確保各功能模塊間信號(hào)完整性與同步操作，提升系統(tǒng)反應(yīng)速度與整體協(xié)同能力；
典型設(shè)備：用于 TEL 的刻蝕機(jī)、CVD 設(shè)備、顯影系統(tǒng)等中。
2. I/O 信號(hào)輸入輸出分發(fā)與管理
功能說明：負(fù)責(zé)收集來自傳感器、執(zhí)行機(jī)構(gòu)（如電磁閥、伺服馬達(dá)等）的輸入信號(hào)，并輸出控制信號(hào)；
接口類型：可能包含數(shù)字量（DI/DO）、模擬量（AI/AO）、通訊端口（如 RS-232、RS-485、CAN、Ethernet 等）；
作用場(chǎng)景：溫度控制、氣流調(diào)節(jié)、壓力檢測(cè)、電機(jī)驅(qū)動(dòng)信號(hào)交互等。
3. 多系統(tǒng)協(xié)同控制橋接單元
協(xié)同作用：支持多個(gè)子系統(tǒng)數(shù)據(jù)互聯(lián)，實(shí)現(xiàn)設(shè)備整體運(yùn)行的同步控制；
總線支持：可能內(nèi)嵌支持標(biāo)準(zhǔn)工業(yè)通信協(xié)議，如 I2C、SPI、MODBUS、SECS/GEM 等；
工藝保障：使晶圓加工過程中的各子系統(tǒng)協(xié)調(diào)運(yùn)行，避免延遲或干擾。
英文資料：
Tokyo Electron (TEL) 3D81-000102-V1 Interface Board - Detailed Explanation of Product Application Fields
1、 Product functional positioning
The 3D81-000102-V1 interface board is an important component used for signal conversion, control communication, and module interconnection in Tokyo Electron semiconductor manufacturing equipment. It serves as a data bridge between the device control system and external execution units, playing a role as a "control center extension" during the operation of the device.
2、 Main application areas
1. Communication interface between device modules
Function description: Connect the main control system (such as the main controller, processor module) with subsystems (such as gas control unit, temperature control module, motor controller);
Application value: Ensure signal integrity and synchronous operation between various functional modules, improve system response speed and overall collaboration capability;
Typical equipment: used in TEL etching machines, CVD equipment, developing systems, etc.
2. I/O signal input/output distribution and management
Function description: Responsible for collecting input signals from sensors, actuators (such as solenoid valves, servo motors, etc.), and outputting control signals;
Interface types: may include digital signals (DI/DO), analog signals (AI/AO), communication ports (such as RS-232, RS-485, CAN, Ethernet, etc.);
Application scenarios: temperature control, airflow regulation, pressure detection, motor drive signal interaction, etc.
3. Multi system collaborative control bridge unit
Collaboration: Support data interconnection among multiple subsystems to achieve synchronous control of overall device operation;
Bus support: may embed support for standard industrial communication protocols such as I 2 C, SPI, MODBUS, SECS/GEM, etc;
Process assurance: Ensure the coordinated operation of various subsystems during wafer processing to avoid delays or interference.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
MOTOROLA MVME2604761 IO系統(tǒng)模塊
ABB GJR5251200R0202?07AI90-S?D2 分析輸入單元
4.其他英文產(chǎn)品
GE IS200TRLYH1B power converter
ASEA DSQC108 controller backplane
FOXBORO RH926GH Control Input Card
| 3N63-100-1 | CACR-SR15BE12F-E | 04136J58G0001 |
| 3N63-000-3 | 531X302DCIAPG1 | 04116J81G0001 |
| 3N63-000-2 | 531X302DCIAMG1 | 04116J79G0002 |
| -3KB11 | 531X302DCIAHG2 | IC3606SIIA9A |
| 3HNM07686-1 | 531X302DCIABG4 | IC3606DEXB1A |
| 3HAB2207-1 | 531X302DCIABG3 | IC3603A328A |
本篇文章出自瑞昌明盛自動(dòng)化設(shè)備有限公司官網(wǎng)，轉(zhuǎn)載請(qǐng)附上此鏈接:http://www.jiangxidcs
