Tokyo Electron 3Z89-000012-11 電源機架 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Tokyo Electron (TEL) 3Z89-000012-11 電源機架 — 產(chǎn)品應用領(lǐng)域詳解
一、產(chǎn)品功能定位
3Z89-000012-11 電源機架是 Tokyo Electron 半導體設(shè)備中用于集中供電、配電與電源模塊集成的核心子系統(tǒng)。它為整機控制系統(tǒng)、驅(qū)動模塊、傳感器單元等提供穩(wěn)定、安全的電源環(huán)境，并具有良好的電磁隔離與模塊化支持能力。
二、主要應用領(lǐng)域
1. 半導體制造設(shè)備的電源管理核心
適用設(shè)備類型：
光刻機（Lithography）
刻蝕機（Etcher）
CVD/PVD 薄膜沉積系統(tǒng)
晶圓清洗與處理設(shè)備
主要任務：
集成多組電源模塊（如 DC、AC/DC 轉(zhuǎn)換、電壓穩(wěn)壓等）
提供多路穩(wěn)定電源（如 5V、12V、24V、48V）輸出
支持冗余配置與熱插拔維護
2. 設(shè)備內(nèi)部多模塊供電平臺
集中供電：統(tǒng)一為控制器、接口板、傳感器模塊、驅(qū)動器等子系統(tǒng)提供所需電源；
多電壓輸出：滿足不同控制單元的工作電壓要求，簡化布線結(jié)構(gòu)；
功率分配與保護：帶有熔斷器、電流保護、過壓/過熱保護機制，保障系統(tǒng)安全運行。
英文資料：
Tokyo Electron (TEL) 3Z89-000012-11 Power Rack - Product Application Field Detailed Explanation
1、 Product functional positioning
The 3Z89-000012-11 power rack is a core subsystem used for centralized power supply, distribution, and power module integration in Tokyo Electron semiconductor equipment. It provides a stable and safe power environment for the overall control system, drive module, sensor unit, etc., and has good electromagnetic isolation and modular support capabilities.
2、 Main application areas
1. Power management core of semiconductor manufacturing equipment
Applicable device types:
Lithography machine
Etcher (Etcher)
CVD/PVD thin film deposition system
Wafer cleaning and processing equipment
Main tasks:
Integrate multiple power modules (such as DC, AC/DC conversion, voltage stabilization, etc.)
Provide multiple stable power sources (such as 5V, 12V, 24V, 48V) for output
Support redundant configuration and hot swappable maintenance
2. Multi module power supply platform inside the device
Centralized power supply: providing the required power supply for subsystems such as controllers, interface boards, sensor modules, drivers, etc. in a unified manner;
Multi voltage output: meets the working voltage requirements of different control units and simplifies the wiring structure;
Power allocation and protection: equipped with fuses, current protection, and overvoltage/overheating protection mechanisms to ensure the safe operation of the system.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
ABB GJR5251200R0202?07AI90-S?D2 分析輸入單元
ABB??UFC933A102?3BHE048062R0102? 電路板
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NI PCI4451 Data Acquisition Card
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ABB XVC768117 Field Input/Output Module
| 369-HI-0-M-F-E-0 | 531X305NTBAEG1 | IC3603A177CG5 |
| 369-HI-0-M-0-0-E | SS2000-PCI | IC3603A177CF6 |
| 369-HI-0-M-0-0 | 531X301DCCAJM1 | IC3603A177AH9 |
| 369-HI-0-B-F-D-0-E | 531X301DCCAHM1 | IC3603A177AH2 |
| 369-HI-0-B-0-0-0-0 | 531X301DCCADM1 | IC3603A177AG9 |
| 369-HI-0-0-0-0 | 531X300CCHBDM3 | IC3603A177AG2 |
| 36-0201 | 531X300CCHAXM3 | IMDSI14 |
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