Tokyo Electron MB3M36-050151-11真空計 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Tokyo Electron (TEL) MB3M36-050151-11 真空計 — 產(chǎn)品應用領域詳解
一、產(chǎn)品功能定位
MB3M36-050151-11 真空計是用于測量和監(jiān)控真空環(huán)境壓力的精密儀器，廣泛集成于 Tokyo Electron 半導體設備中。其主要職責是實時反饋真空腔體或氣路系統(tǒng)中的壓強狀態(tài)，確保工藝流程在理想的氣壓條件下運行。
二、主要應用領域
1. 半導體制造設備的真空狀態(tài)監(jiān)控
應用設備類型：
刻蝕機（Etcher）
化學氣相沉積設備（CVD、ALD）
清洗系統(tǒng)、真空負載鎖、腔體反應系統(tǒng)等
功能說明：
通過連接到反應腔、前級泵、渦輪泵入口或真空管道，實現(xiàn)從常壓到超高真空（10?? Pa）范圍的精準測量。
2. 工藝真空控制閉環(huán)系統(tǒng)的核心傳感器
與系統(tǒng)聯(lián)動：
與真空控制器、排氣系統(tǒng)（如渦輪分子泵、干泵）協(xié)同，形成閉環(huán)控制回路，實現(xiàn)自動抽氣、穩(wěn)壓與放氣。壓力設定閾值觸發(fā)：
可在設定壓力范圍內(nèi)啟/停泵系統(tǒng)，或聯(lián)動閥門控制單元。
英文資料：
Tokyo Electron (TEL) MB3M36-050151-11 Vacuum Gauge - Detailed Explanation of Product Application Fields
1、 Product functional positioning
MB3M36-050151-11 vacuum gauge is a precision instrument used for measuring and monitoring vacuum environmental pressure, widely integrated into Tokyo Electron semiconductor equipment. Its main responsibility is to provide real-time feedback on the pressure status in the vacuum chamber or gas system, ensuring that the process operates under ideal pressure conditions.
2、 Main application areas
1. Vacuum state monitoring of semiconductor manufacturing equipment
Application device type:
Etcher (Etcher)
Chemical vapor deposition equipment (CVD, ALD)
Cleaning system, vacuum load lock, chamber reaction system, etc
Function Description:
Accurate measurement from atmospheric pressure to ultra-high vacuum (10 ?? Pa) can be achieved by connecting to the reaction chamber, pre pump, turbo pump inlet, or vacuum pipeline.
2. Core sensors of process vacuum control closed-loop system
Linkage with the system:
Collaborate with vacuum controllers and exhaust systems (such as turbo molecular pumps and dry pumps) to form a closed-loop control loop, achieving automatic pumping, stabilization, and deflation.
Pressure setting threshold trigger:
The pump system can be started/stopped within the set pressure range, or linked to a valve control unit.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
ABB??UFC933A102?3BHE048062R0102? 電路板
4.其他英文產(chǎn)品
ABB XVC768117 Field Input/Output Module
Eaton XV-440-10TVB-1-50 Touch Screen
FOXBORO FBM217 Voltage Monitor Module
| 345-E-P5-G5-H-E-M-N-N-2E-N-N | AMAT 0100-09117 | IC3600VRCC1A |
| 345-E-P1-G1-L-E-E-N-N-SN-D-N | AMAT 0100-03012 | IC3600VRCC1 |
| 345-E-P1-G1-H-E-S-N-N-SN-D-N | AMAT 0100-20026 | IC3600VRCA1 |
| 345-E-P1-G1-H-E-S-N-N-1E-N-N | AMAT 0100-77064 | 067-11732-0003 |
| 33VM82-020-19 | AMAT 0100-01884 | CE3100-423-0 |
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