Tokyo Electron 3281-000019-15傳感器組件 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Tokyo Electron (TEL) 3281-000019-15 傳感器組件 — 產(chǎn)品應用領域詳解
一、產(chǎn)品功能定位
3281-000019-15 傳感器組件 是 Tokyo Electron（TEL）半導體設備中用于實時監(jiān)測設備狀態(tài)或工藝參數(shù)的關鍵檢測模塊。此類組件通常結合高精度傳感器、電路板、外殼及通信接口組成，用于采集環(huán)境或設備內(nèi)部特定物理量，為控制系統(tǒng)提供反饋數(shù)據(jù)，實現(xiàn)閉環(huán)控制與異常預警。
二、主要應用領域
1. 關鍵工藝參數(shù)實時監(jiān)測
典型監(jiān)測對象（根據(jù)組件編號推測）：
溫度（熱電偶或RTD）
壓力（真空腔體、氣路）
位移/位置（機械臂、升降裝置）
氣體流量或氣氛檢測（MFC旁路或傳輸路徑）
設備類型：
薄膜沉積設備（CVD、ALD、PVD）
晶圓清洗設備、顯影系統(tǒng)
刻蝕設備（Etcher）
晶圓搬運系統(tǒng)、Transfer Modules
2. 過程控制閉環(huán)反饋單元
功能特點：
將采集到的信號通過模擬或數(shù)字方式傳輸給控制器模塊（如 3M81 系列控制板）；
與執(zhí)行機構（如電磁閥、加熱器、電機等）形成閉環(huán)系統(tǒng)，實現(xiàn)精準控制；
可聯(lián)動報警與保護機制，在異常狀態(tài)下快速響應停機或切斷電源。
英文資料：
Tokyo Electron (TEL) 3281-000019-15 Sensor Components - Product Application Field Detailed Explanation
1、 Product functional positioning
The 3281-000019-15 sensor component is a key detection module used in Tokyo Electron (TEL) semiconductor equipment for real-time monitoring of equipment status or process parameters. This type of component is usually composed of high-precision sensors, circuit boards, casings, and communication interfaces, used to collect specific physical quantities inside the environment or equipment, provide feedback data for the control system, and achieve closed-loop control and abnormal warning.
2、 Main application areas
1. Real time monitoring of key process parameters
Typical monitoring objects (inferred based on component numbers):
Temperature (thermocouple or RTD)
Pressure (vacuum chamber, gas path)
Displacement/position (robotic arm, lifting device)
Gas flow or atmosphere detection (MFC bypass or transmission path)
Equipment type:
Thin film deposition equipment (CVD, ALD, PVD)
Wafer cleaning equipment, developing system
Etcher equipment
Wafer handling system Transfer Modules
2. Process control closed-loop feedback unit
Functional features:
Transmit the collected signals to the controller module (such as the 3M81 series control board) through analog or digital means;
Form a closed-loop system with executing agencies (such as solenoid valves, heaters, motors, etc.) to achieve precise control;
It can be linked with alarm and protection mechanisms to quickly respond to shutdown or power cut off in abnormal states.
2.產(chǎn) 品 展 示
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