Tokyo Electron 2L80-004992-V2供應(yīng)板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Tokyo Electron 2L80-004992-V2 供應(yīng)板（Supply Board） 是一款專用于 TEL 半導(dǎo)體設(shè)備中的電源/信號分配模塊，通常作為系統(tǒng)內(nèi)部多路電源或信號的集中供應(yīng)平臺。該組件廣泛應(yīng)用于蝕刻、沉積、光刻等設(shè)備的電氣子系統(tǒng)中，是保障設(shè)備穩(wěn)定運行的重要基礎(chǔ)單元。
一、產(chǎn)品功能定位
模塊類型：供應(yīng)板 / 電源分配板（Power or Signal Supply Board）
主要功能：
將主電源或主信號源通過該板進行分支、隔離、穩(wěn)壓后輸出至各子系統(tǒng)；
實現(xiàn)電源分區(qū)管理、過流保護、信號通道切換等功能；
可與控制板、接口板等配合，實現(xiàn)邏輯控制和集中布線。
二、典型應(yīng)用領(lǐng)域
1. 設(shè)備電源管理系統(tǒng)
為多個子模塊（加熱器、閥門驅(qū)動器、傳感器、PLC板等）提供統(tǒng)一電源；
包括 +5V、+12V、+24V、-12V 等多路低壓直流供電。
2. 控制與邏輯系統(tǒng)的信號分發(fā)
分發(fā)來自主控制器的數(shù)字/模擬信號到各功能模塊；
提供光耦隔離、信號緩沖、狀態(tài)指示等附加功能。
3. 工藝子系統(tǒng)集成接口
用于管理氣路、溫控、液路、RF 功率模塊等關(guān)鍵子系統(tǒng)的供電與接口分布；
在模塊化結(jié)構(gòu)中作為背板或橋接平臺存在。
英文資料：
The Tokyo Electron 2L80-004992-V2 Supply Board is a power/signal distribution module specifically designed for TEL semiconductor equipment, typically serving as a centralized supply platform for multiple power sources or signals within the system. This component is widely used in the electrical subsystems of etching, deposition, lithography and other equipment, and is an important basic unit to ensure the stable operation of the equipment.
1、 Product functional positioning
Module type: Power or Signal Supply Board
Main functions:
Branch, isolate, and stabilize the main power or signal source through this board before outputting it to each subsystem;
Implement functions such as power partition management, overcurrent protection, and signal channel switching;
It can be used in conjunction with control boards, interface boards, etc. to achieve logical control and centralized wiring.
2、 Typical application areas
1. Equipment power management system
Provide unified power supply for multiple sub modules (heaters, valve drivers, sensors, PLC boards, etc.);
Including multiple low-voltage DC power supplies such as+5V,+12V,+24V, -12V, etc.
2. Signal distribution for control and logic systems
Distribute digital/analog signals from the main controller to various functional modules;
Provide additional functions such as optocoupler isolation, signal buffering, and status indication.
3. Integration interface of process subsystem
Used to manage the power supply and interface distribution of key subsystems such as gas circuit, temperature control, liquid circuit, RF power module, etc;
It exists as a backplane or bridging platform in modular structures.
2.產(chǎn) 品 展 示
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| SR469-P5-LO-A20-E | SC452-044-05 | SC903-020-01 |
| SR469-P5-LO-A20 | AMAT 0100-09050 | SC903TN-001-01 |
| SR469-P5-HI-A20-T | AMAT 0100-00689 | PFEA 113, IP 65 |
| SR469-P5-HI-A20-E-H | AMAT 0100-A0491 | PFCL 301E-0.2 |
| SR469-P5-HI-A20-E | AMAT 0100-13025 | DSRC 113 ABB |
| SR469-P5-HI-A20 | AMAT 0100-76109 | PFCL 301E-1.0KN |
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