Tokyo Electron 3Z80-000604-11控制器盒 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Tokyo Electron 3Z80-000604-11 控制器盒（Controller Enclosure/Box） 是 TEL 半導(dǎo)體設(shè)備中用于安裝和保護(hù)控制模塊及其相關(guān)電子組件的機(jī)箱或外殼單元。它不僅為控制器模塊提供機(jī)械保護(hù)，還負(fù)責(zé)散熱、防塵和電磁屏蔽，確保控制系統(tǒng)穩(wěn)定可靠運(yùn)行。
一、產(chǎn)品功能定位
類型：控制器模塊外殼 / 機(jī)箱
主要功能：
保護(hù)內(nèi)部控制器電路板及電子元件免受外部機(jī)械損傷、灰塵和污染；
具備散熱結(jié)構(gòu)，輔助控制器溫度管理，避免過熱；
支持控制模塊的安裝固定和連接接口布置；
提供電磁干擾（EMI）屏蔽，保障信號(hào)穩(wěn)定。
二、應(yīng)用領(lǐng)域
半導(dǎo)體制造設(shè)備中的控制系統(tǒng)保護(hù)
蝕刻設(shè)備、沉積設(shè)備等關(guān)鍵工藝設(shè)備中的控制器安裝盒；
確保控制模塊在潔凈室和工業(yè)環(huán)境下的安全與穩(wěn)定工作。
控制模塊維護(hù)與更換支持
便于快速拆裝，支持設(shè)備維修和模塊替換；
結(jié)構(gòu)設(shè)計(jì)符合 TEL 標(biāo)準(zhǔn)模塊化規(guī)范。
英文資料：
The Tokyo Electron 3Z80-000604-11 Controller Enclosure/Box is a chassis or enclosure unit used in TEL semiconductor equipment to install and protect control modules and their related electronic components. It not only provides mechanical protection for the controller module, but also is responsible for heat dissipation, dust prevention, and electromagnetic shielding to ensure stable and reliable operation of the control system.
1、 Product functional positioning
Type: Controller Module Shell/Chassis
Main functions:
Protect the internal controller circuit board and electronic components from external mechanical damage, dust, and pollution;
Equipped with a heat dissipation structure to assist in temperature management of the controller and prevent overheating;
Support the installation, fixation, and layout of connection interfaces for control modules;
Provide electromagnetic interference (EMI) shielding to ensure signal stability.
2、 Application Fields
Control System Protection in Semiconductor Manufacturing Equipment
Controller installation box in key process equipment such as etching equipment and deposition equipment;
Ensure the safe and stable operation of control modules in clean rooms and industrial environments.
Maintenance and replacement support for control modules
Easy to disassemble and assemble quickly, supporting equipment maintenance and module replacement;
The structural design complies with the TEL modular specification.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
Intelligent Instrumentation TM2500-001B 終端操作面板
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