Tokyo Electron 2L39-000048-54發(fā)電機 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Tokyo Electron 2L39-000048-54 發(fā)電機 是一款用于半導體制造設備輔助電源供應的關鍵部件，主要功能是為設備內(nèi)部提供穩(wěn)定的交流或直流電力，保障工藝系統(tǒng)持續(xù)、可靠運行。該發(fā)電機通常集成于大型 TEL 設備的電源管理子系統(tǒng)中，確保設備在電力波動或外部斷電情況下維持關鍵控制與工藝運行。
一、產(chǎn)品功能定位
類型：輔助電源發(fā)電機 / 備用電源模塊
主要功能：
提供穩(wěn)定、持續(xù)的電力輸出支持設備運行；
防止因外部電源中斷導致的工藝中斷或設備損壞；
可能與不間斷電源（UPS）系統(tǒng)或電池組配合使用。
二、主要應用領域
1. 半導體制造設備電源保障
支持蝕刻、沉積、光刻等設備關鍵模塊的電力供應；
保障設備在電網(wǎng)波動或短時斷電情況下平穩(wěn)運行。
2. 工廠自動化系統(tǒng)
作為生產(chǎn)線關鍵設備的備用電源；
維護數(shù)據(jù)完整性與工藝參數(shù)連續(xù)性。
英文資料：
The Tokyo Electron 2L39-000048-54 generator is a key component used for auxiliary power supply in semiconductor manufacturing equipment. Its main function is to provide stable AC or DC power for the internal of the equipment, ensuring the continuous and reliable operation of the process system. This generator is typically integrated into the power management subsystem of large TEL equipment to ensure critical control and process operation in the event of power fluctuations or external power outages.
1、 Product functional positioning
Type: Auxiliary Power Generator/Backup Power Module
Main functions:
Provide stable and continuous power output to support equipment operation;
Prevent process interruption or equipment damage caused by external power interruption;
May be used in conjunction with uninterruptible power supply (UPS) systems or battery packs.
2、 Main application areas
1. Power supply guarantee for semiconductor manufacturing equipment
Support power supply for key modules of equipment such as etching, deposition, and photolithography;
Ensure the smooth operation of equipment in the event of power grid fluctuations or short-term power outages.
2. Factory automation system
As a backup power source for key equipment on the production line;
Maintain data integrity and process parameter continuity.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
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