Tokyo Electron 3M87-021335冷卻器組件 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Tokyo Electron 3M87-021335 冷卻器組件（Chiller Unit / Cooler Assembly） 是一款用于 TEL 半導(dǎo)體設(shè)備中的溫度控制部件，主要功能是在復(fù)雜工藝過程中對關(guān)鍵部件如腔體、電源模塊、工藝氣體或液體流通系統(tǒng)進(jìn)行精準(zhǔn)的冷卻管理，確保設(shè)備運(yùn)行的熱穩(wěn)定性和工藝一致性。
一、產(chǎn)品功能概述
類型：冷卻器組件 / 液冷系統(tǒng)子單元
主要功能：
為腔體、RF 模塊、光源、加熱平臺等關(guān)鍵單元提供冷卻；
保持系統(tǒng)溫度在設(shè)定范圍內(nèi)，防止過熱；
支持溫度反饋控制和多級冷卻液流速調(diào)節(jié)。
二、典型應(yīng)用領(lǐng)域
1. 蝕刻設(shè)備（Etch Systems）
冷卻反應(yīng)腔體壁面，控制等離子體環(huán)境溫度；
抑制微粒生成，提高蝕刻精度。
2. CVD / ALD 沉積設(shè)備
穩(wěn)定反應(yīng)室及 precursor 輸送系統(tǒng)溫度，避免材料結(jié)晶或沉積缺陷；
控制溫度梯度以保障膜層均勻性。
3. 顯影 / 清洗模塊
為顯影液、去膠液、DI 水等液體冷卻循環(huán)系統(tǒng)提供支持；
保證化學(xué)反應(yīng)在合適溫度下進(jìn)行，提高清洗效果。
4. RF 電源和激光光源冷卻
防止射頻匹配器、激光組件等電子設(shè)備過熱；
延長關(guān)鍵電子元件的使用壽命。
英文資料：
The Tokyo Electron 3M87-021335 Chiller Unit/Cooler Assembly is a temperature control component used in TEL semiconductor equipment. Its main function is to accurately cool and manage critical components such as chambers, power modules, process gas or liquid circulation systems during complex processes, ensuring the thermal stability and process consistency of equipment operation.
1、 Product Function Overview
Type: Cooler component/Liquid cooling system subunit
Main functions:
Provide cooling for key units such as cavities, RF modules, light sources, heating platforms, etc;
Maintain the system temperature within the set range to prevent overheating;
Support temperature feedback control and multi-stage coolant flow rate adjustment.
2、 Typical application areas
Etch Systems etching equipment
Cooling the wall of the reaction chamber and controlling the temperature of the plasma environment;
Inhibit particle generation and improve etching accuracy.
2. CVD/ALD deposition equipment
Stabilize the temperature of the reaction chamber and precursor transport system to avoid material crystallization or deposition defects;
Control the temperature gradient to ensure the uniformity of the film layer.
3. Development/cleaning module
Provide support for liquid cooling and circulation systems such as developing solution, de sizing solution, DI water, etc;
Ensure that chemical reactions occur at appropriate temperatures to improve cleaning effectiveness.
4. RF power supply and laser light source cooling
Prevent overheating of electronic devices such as RF adapters and laser components;
Extend the lifespan of critical electronic components.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
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| SC724A-001-PM72016 | CACR-SR10BB-BF1 | 6ES5246-4UA31 |
| SC724A-001-PM72007 | CACR-SR15SB1AF-Y100 | EXM-2 |
| SC724A001 | CACR-TS111Z1SR | 61-0367-38 |
| SC723B001 | CACR-TM555Z1SP | HSK-0018-60 |
| SC723A-001-PM72032 | CACR-SR06TZ0SM | 879-8103-002A |
| SC723A-001-PM72012 | CACR-SR05SB1AF | 61-0881-20 |
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