Tokyo Electron ES1D80-003817-15匹配器 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Tokyo Electron ES1D80-003817-15 匹配器（Matching Network） 是一款用于射頻（RF）能量系統(tǒng)中的阻抗匹配模塊，廣泛應(yīng)用于 TEL（Tokyo Electron）蝕刻或等離子體沉積等設(shè)備中，用于確保 RF 電源與工藝腔體之間實(shí)現(xiàn)最佳阻抗匹配，從而最大限度地提升能量傳輸效率并穩(wěn)定等離子體特性。
一、產(chǎn)品基本信息
產(chǎn)品名稱(chēng)：匹配器（Matching Network）
產(chǎn)品型號(hào)：ES1D80-003817-15
設(shè)備歸屬：Tokyo Electron 半導(dǎo)體制造設(shè)備（通常屬于 D80 或 D80 系列的子模塊）
二、核心功能
自動(dòng)阻抗匹配
實(shí)時(shí)監(jiān)測(cè)工藝腔體阻抗變化，自動(dòng)調(diào)整匹配電感/電容；
將 RF 電源輸出阻抗（通常為 50Ω）與工藝負(fù)載精確匹配；
保證最小反射功率，最大限度提高 RF 能量的有效利用率。
等離子體工藝穩(wěn)定性保障
保持穩(wěn)定的射頻功率傳輸，有助于穩(wěn)定等離子體密度與均勻性；
適應(yīng)不同工藝氣體或反應(yīng)條件下的阻抗變化。
射頻系統(tǒng)保護(hù)
防止因阻抗不匹配產(chǎn)生的反射功率損害 RF 電源；
提升設(shè)備壽命和運(yùn)行安全性。
英文資料：
The Tokyo Electron ES1D80-003817-15 Matching Network is an impedance matching module used in radio frequency (RF) energy systems. It is widely used in TEL (Tokyo Electron) etching or plasma deposition equipment to ensure optimal impedance matching between the RF power supply and the process chamber, thereby maximizing energy transfer efficiency and stabilizing plasma characteristics.
1、 Basic Product Information
Product Name: Matching Network
Product model: ES1D80-003817-15
Equipment ownership: Tokyo Electron semiconductor manufacturing equipment (usually sub modules belonging to D80 or D80 series)
2、 Core functions
Automatic impedance matching
Real time monitoring of impedance changes in the process chamber, automatic adjustment of matching inductance/capacitance;
Accurately match the output impedance of the RF power supply (usually 50 Ω) with the process load;
Ensure minimum reflected power and maximize the effective utilization of RF energy.
Stability guarantee of plasma process
Maintaining stable RF power transmission helps to stabilize plasma density and uniformity;
Adapt to impedance changes under different process gases or reaction conditions.
RF system protection
Prevent RF power supply from being damaged by reflected power caused by impedance mismatch;
Improve equipment lifespan and operational safety.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
4.其他英文產(chǎn)品
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