Tokyo Electron FPF07P-AC100E超聲波器 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Tokyo Electron FPF07P-AC100E 超聲波器（Ultrasonic Transducer Unit） 是一款集成于 TEL 濕法清洗或顯影設備中的關(guān)鍵清洗組件，主要用于通過超聲波空化效應對晶圓表面進行非接觸、高精度清洗。該型號適用于晶圓前道或中段工藝清洗處理，可顯著提高顆粒去除率并提升良率。
一、產(chǎn)品基本信息
產(chǎn)品名稱：超聲波器 / 超聲波清洗頭
產(chǎn)品型號：FPF07P-AC100E
制造商：Tokyo Electron Ltd.（TEL）
工作電壓：AC 100V（從型號推測）
適用位置：晶圓清洗腔體、顯影槽、脫膠槽等模塊內(nèi)
二、核心功能
高效顆粒去除
通過高頻振動在液體中形成微小空化氣泡，清除晶圓表面的微粒、殘膠、金屬離子等污染物；
有效用于清除 0.1 μm 以下的微細顆粒。
非接觸清洗
不對晶圓造成物理接觸，適用于先進制程（FinFET、EUV）下對表面應力極其敏感的器件結(jié)構(gòu)。
支持化學液清洗
可配合去離子水（DIW）、臭氧水、SC-1、SC-2、稀釋氫氟酸等清洗液使用。
安全控制機制
集成溫控、液位檢測、功率保護等聯(lián)動功能；
支持與主設備通訊，自動啟停與報警反饋。
英文資料：
The Tokyo Electron FPF07P-AC100E Ultrasonic Transformer Unit is a key cleaning component integrated into TEL wet cleaning or developing equipment, mainly used for non-contact, high-precision cleaning of wafer surfaces through ultrasonic cavitation effect. This model is suitable for cleaning processes in the front or middle stages of wafers, which can significantly improve particle removal efficiency and yield.
1、 Basic Product Information
Product Name: Ultrasonic cleaner/Ultrasonic cleaning head
Product model: FPF07P-AC100E
Manufacturer: Tokyo Electron Ltd. (TEL)
Working voltage: AC 100V (inferred from the model)
Applicable location: in modules such as wafer cleaning chamber, developing tank, and delamination tank
2、 Core functions
Efficient particle removal
By high-frequency vibration, tiny cavitation bubbles are formed in the liquid to remove pollutants such as particles, residual glue, and metal ions from the wafer surface;
Effectively used for removing fine particles below 0.1 μ m.
Non contact cleaning
Not causing physical contact with the wafer, suitable for device structures that are extremely sensitive to surface stress in advanced processes (FinFET, EUV).
Support chemical solution cleaning
Can be combined with deionized water (DIW), ozone water SC-1、SC-2、 Dilute hydrofluoric acid and other cleaning solutions for use.
Security control mechanism
Integrated linkage functions such as temperature control, liquid level detection, and power protection;
Support communication with the main device, automatic start stop and alarm feedback.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
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