Tokyo Electron 3281-000138-12控制板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
產(chǎn)品名稱：3281-000138-12 控制板
制造商：Tokyo Electron (TEL)
產(chǎn)品類型：電子控制板模塊
一、產(chǎn)品概述
3281-000138-12 控制板是用于東京電子半導(dǎo)體設(shè)備中的控制核心組件之一，主要承擔(dān)設(shè)備邏輯控制、信號(hào)處理和通信協(xié)調(diào)等功能。
二、主要功能
控制設(shè)備運(yùn)行流程，如開(kāi)關(guān)控制、動(dòng)作協(xié)調(diào)等。
接收和發(fā)送數(shù)字/模擬信號(hào)，實(shí)現(xiàn)對(duì)現(xiàn)場(chǎng)傳感器與執(zhí)行器的實(shí)時(shí)控制。
與上位系統(tǒng)或主控計(jì)算機(jī)通信，交換狀態(tài)和參數(shù)數(shù)據(jù)。
支持設(shè)備參數(shù)設(shè)定、故障反饋、報(bào)警聯(lián)動(dòng)等功能。
三、適用設(shè)備（可能包括）
TEL 干法蝕刻設(shè)備
TEL PVD/CVD 薄膜沉積設(shè)備
TEL 涂膠顯影設(shè)備（Coater/Developer）
TEL 拋光設(shè)備（如 CMP）等
四、技術(shù)特性（通用控制板參考）
輸入電壓：常見(jiàn)為 24V DC
接口類型：RS-232、485、數(shù)字IO、模擬IO（依據(jù)版本）
處理器：嵌入式控制器或FPGA
安裝方式：機(jī)架式插槽或獨(dú)立固定安裝
通信支持：可能支持 TEL 專有通信協(xié)議
英文資料：
Product Name: 3281-000138-12 Control Board
Manufacturer: Tokyo Electron (TEL)
Product Type: Electronic Control Board Module
1、 Product Overview
The 3281-000138-12 control board is one of the control core components used in Tokyo electronic semiconductor equipment, mainly responsible for equipment logic control, signal processing, and communication coordination functions.
2、 Main functions
Control the operation process of equipment, such as switch control, action coordination, etc.
Receive and send digital/analog signals to achieve real-time control of on-site sensors and actuators.
Communicate with the upper system or main control computer to exchange status and parameter data.
Support device parameter setting, fault feedback, alarm linkage and other functions.
3、 Applicable equipment (may include)
TEL dry etching equipment
TEL PVD/CVD thin film deposition equipment
TEL coating and developing equipment (Coater/Developer)
TEL polishing equipment (such as CMP), etc
4、 Technical characteristics (reference for general control board)
Input voltage: commonly 24V DC
Interface types: RS-232, 485, digital IO, analog IO (depending on version)
Processor: Embedded controller or FPGA
Installation method: Rack mounted slot or independent fixed installation
Communication support: may support TEL proprietary communication protocol
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
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GE VMIVME-017807-414001 直流信號(hào)輸出模塊
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| 6ES5482-7LF21 | CACR-SR20BE | 61-0124-03 |
| 6ES5477-8EC11 | CACR-SR15BE13S | 5341852 |
| 6ES5470-7LC13 | CACR-SR06TZ9SMY02A | 3BHB005171R0101 |
| 6ES5470-7LC12 | CACR-PR30BC3AFY | 3HAB8101-19 DSQC545A |
| 6ES5470-7LB13 | CACR-SR05BB1BF | 6SC6101-2B-Z |
| 6ES5470-7LB12 | CONTROLLER | TSX3721101 |
| 6ES5470-7LA13 | CACR-SR03SB1AF | TSX07301012 |
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